SILVACO TCAD - INCOMPLETE OF TONYPLOT

[aswinnsa127]

Hello, I am trying construct a n IGZO-TFT structure in silvaco and unable to deposit Zno layer on it. So, I am seeking for help. Please , help me . Here am I attached the photo which i want to constructure and which i build up to now

Program code:

go athena

#mesh
line x loc=0.00 spac=0.10
line x loc=0.01 spac=0.01
line x loc=0.02 spac=0.01
line x loc=0.03 spac=0.05
line x loc=0.05 spac=0.04

line y loc=0.00 spac=0.10
line y loc=0.01 spac=0.01
line y loc=0.02 spac=0.01
line y loc=0.03 spac=0.02
line y loc=0.05 spac=0.02

#mesh init.

#
init silicon orientation=100 two.d
#
#
diffus time=30 minutes temp=1000 dryo2 c.silicon=1e15
#
etch oxide all

#
diffus time=15 minutes temp=900 dryo2 c.zinc=1e15

#
deposit oxide thick=0.2 c.zinc=1e11 divisions=10







struct outfile= tft_model_1.str
tonyplot tft_model_1.str
quit

 

[dick_freebird]

Very few people are into semiconductor TCAD, fewer still for non-silicon and of these none have any reason to answer when you show nothing about the problem. Just a cartoon and an input deck.

Not much into it myself but I don't see anything that looks like ZnO dep or Zn dep to oxidize. More like doped glass as it looks to be described. You want thin film I expect.

Might check out "silvaco chalcogenide" as sort-of-adjacent tech that people tried to commercialize as another heterointegration with silicon (CRAM). II-VI-ish anyway.

Silvaco has application engineers if you're a customer. There's a process for getting access to docs and other tool support.