Need of Epitaxial layer in cmos fabrication

Status
Not open for further replies.
T

the moon is back

Member level 2
Joined
Apr 29, 2012
Messages
42
Helped
0
Reputation
0
Reaction score
0
Trophy points
1,286
Visit site
Activity points
1,566
Hi everyone,

I need to know that whats the significant of epitaxial layer in cmos ic fabrication.
why cant the ic is directly manufactured on the P-substrate?
If done so, what are the effects?
Is formation of epitaxial layer on the P-substrate is necessary?

Kindly provide some use full information.

Thanks & Regards
 

The use of the epitaxial layer is not so much about the
device quality (bulk P- would do as well, for explicit
FET qualities) but the abnormal - latchup especially.
Epi is how you get a high resistivity device layer on a
heavily doped handle, that does a better job of shunting
parasitic BJTs and much eases latchup prevention.
 
Status
Not open for further replies.

Similar threads

Menu
Log in
Register
Cookies are required to use this site. You must accept them to continue using the site. Learn more…