Where to find technology charts ?

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superluminal

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Hi

I want to know how I can get charts & graphs for Si fabrication technology ( the real new ones, not those found in old processing books) . Charts like: thermal oxidation of Si with time, solid solubility in Si .....etc

Thanks in advance
 

Hi,

I've been looking for the same thing.

The closest I've found so far is from IEEE journal of solid state circuit (JSSC) and to some extent in the lecture notes from VLSI class of leading university
 

even these universities do not provide this ! they mostly take the charts from the processing books which by turn take it from old papers & researches back to 70's & 80's.

I think this will not be avaliable, as it is dependent on fab.
 

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