What's the meaning of "ONO"?

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adscrz

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Drawing Rules for ONO Capacitor……


What's the meaning of "ONO"?

also the Psub, ONO, TG

THX
 

ONO may be Oxide-Nitride-Oxide. ONO capacitor may be capacitor with ONO dielectric.

Psub: p-type substrate
 

TG=temperature gradient?
 

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