What's the function of this part in a RF power transistor ?

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Hi,Boowei,

Are you designing UHF transistor? Normally, we need as high value C3 as possible, but sometimes we have to consider some other aspects like the temperature of L-shund wires. If you have exprience, you know that wires are the most hot ones even compared to the die.

Added after 10 minutes:

I'm not the designer of that transistor. I don't know why exactly, it's also a part of the mathcing. But I guess sometimes the moscap's value decided by many times experiments, and finally you don't know why to choose this one with better performance as higher eff higher linearity.
I just mean sometimes 80% of the circuit depends on theory, 20% depends on tuning!
 

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