[SOLVED] What's the difference between VPE and CVD?

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stackprogramer

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whats differnce between VPE and CVD ?

hi in technology book use words CVD and VPE,
i know CVD="chemical vapor deposition" VPE="vapor phase epitaxy"
i read MBE is subset of CVD,i am confused.
MBE and MOCVD are VPE or CVD?
thanks for reply
 

Re: whats differnce between VPE and CVD ?

stackprogramer said:
i read MBE is subset of CVD
Click to expand...
Only in the meaning that both methods deposit material on top of a target.

stackprogramer said:
MBE and MOCVD are VPE or CVD?
Click to expand...

MBE is a purely physical deposition method, CVD and MOCVD - as their name says - are chemical methods (a chemical reaction of a gas over or at the target surface), and VPE can be either a physical or a chemical deposition method, depending on which type of vapor is used. In the latter case, VPE (or MOVPE) may be considered as a subset of CVD. For more info see the corresponding Wiki articles.
 
Re: whats differnce between VPE and CVD ?

Epitaxy is meant to add to a crystalline structure and
keep the lattice form. CVD only needs to deposit the
material and is not expected to grow continuously from
an underlayer "template". Same for PVD, sputtering, etc.
 

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