what material is use for insulator for mim?

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somayehbd

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sio2 is better or nitride? why
what is diffrence between mim capacitor characteristics whit sio2 and whit nitride layer as insulator?
please help me:---(
 

Nitride will stand off more field, so give you more C density
for a given working voltage.

But it has some nasty charge behaviors as I recall.
Still people use it, maybe it's more a no-no as a MOS
gate dielectric than as a simple capacitor.

Si3N4 or SiO2 both are deposited dielectrics, in the
MIM context. You can also find, rarely, an Al2O3
native-grown dielectric on the bottom plate.
 

thanks for reply me
please tell me what is difference between sio2 and nitrid in deposition and difference between them in mim capasitior making
 

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