What is the STI process?

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deh_fuhrer

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what is sti process.please upload some docs on that.
 

Re: STI

STI(Shallow Trench Isolation) is the process used for physical separation of devices in the Chip.It had replaced the older LOCOS process as it offer more planar surface than LOCOS.Also it is free of undesired phenomena like Birdbeak
 

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