what is the capacitance component of MOSFET?

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W_Heisenberg

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I think MOSFET capacitance:

gate capacitance: overlap and channel

diffusion capacitance: n or p diffusion

is this correct?
 

If by gate capacitance you mean gate-bulk capacitance then the gate capacitance consists of series combination of oxide capacitance and depletion capacitance.
We only have gate-bulk capacitance when device is off. In saturation and triode regions this capacitance is neglected because inversion layer shields the bulk.
 

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