Re: Sentaurus TCAD Tools
sentaurus tcad is essentially 3 tools:
A 2D/3D semiconductor process simulator
a 2D/3D device simulator
a Spice Parameter Extraction tool for the device simulator.
It would easily simulate a FinFet.
It is very, very expensive and should really be run on a Linux Farm (multiple processors e.g. 64 or more dual/quad cores, as simulation times can be very long.
It can run on a single computer but really on for 2D simulations.
It is fairly similar to Silvaco TCAD which is also very expensive.
However for FinFet simulation (or any other for that matter) you can obtain FLOOPS/FLOODS from the University of Florida for free or the older Supren IV and Pisces from Stanford University. All the above commercial TCAD software is based on Suprem, Pisces, Floops and Floods.
These programs are not easy to use and you have to have considerable patience to rise up the learning curve (you need a very thick wall to bang your head off!).