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Thanks for your response,

What would be a '"Proper" y capacitor dimensioning for a 2.2Kw motor? I got on the Plug L-N 1.90µF PE-L 376nF PE-N 326 nF

Was running fine for months and two machines are start tripping now. They do not get treated as well and get moved quiet a bit around what might cause damage inside the VFD that's why I took it apart but couldn't determine any visual damage.

Only the VFD is on the circuit so won't be due to much y capacitance + Motor is disconnected and not running.

Could be a semiconductor do you have an idea where to look specifically on the PCB? I added some pictures in my response to Klaus.