threshold voltage sigma variation
My understanding is that Vth not only depends on the process corners but also on the MOSFET aspect ratio(neglecting body effect). To test out statistical variations, I think you can use the gaussian distribution with the the mean set to your Vth0 and a +Sigma,-Sigma set to their 0.34% of the mean.
NOTE: AFAIK, a good layout design can only closely match transistors(Vth,thereby) but not iron out statistical variations across the chip and wafers.