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tsmc epi layer option- normal vs special epi

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lionking819

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tsmc epi layer option

I was told by TSMC person that they have two epi layer option to select
1. normal epi (resistance 6-8Ohm)
2. special epi (no doping, really high resistance and thinner than normal epi)
does anybody use the special epi layer before?
to prevent latchup, which one is better?

thanks
 

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