tsmc 0.13 substrate resistivity

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totowo

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hi everybody,
is there someone kind to tell the substrate resistivity(Ohm.cm) of tsmcrf 0.13?
I want to take a EM simulation with momentum but i cannot find the param in tsmc docs.

Many thanks~
 

it's epitaxy layer resistivity, no substrate resistivity
 

Hi,
Can you give me the name of this document ?
I've signed the NDA document but i don't find the epitaxy layer resistivity information

thx
 

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