Aug 21, 2012 #1 F fujimuji Newbie level 3 Joined Jan 26, 2012 Messages 3 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,298 Hopefully someone can help solve the following. I am trying to run a sentaurus process simulation and keep getting the error below; after field oxidation growth then nitride and pad oxide removal. ** Error ** triangle 122912 is flat ! ... aborting ** Error ** Internal error ! Click to expand... I have tried remeshing by using 'grid remesh' but that didn't make a difference. Also 'grid refine.check' reports everything is fine. Thanks.
Hopefully someone can help solve the following. I am trying to run a sentaurus process simulation and keep getting the error below; after field oxidation growth then nitride and pad oxide removal. ** Error ** triangle 122912 is flat ! ... aborting ** Error ** Internal error ! Click to expand... I have tried remeshing by using 'grid remesh' but that didn't make a difference. Also 'grid refine.check' reports everything is fine. Thanks.