Your jitter analysis wants the various instigators of jitter
to be represented. IMO process and device variation
are the least of these - supply ripple, inter-trace coupling,
bond wire inductance against internal switching activity
and load-driving activity (incl ground bounce) are much
more significant.
True, some process variations matter a bit - like "SS"
corner is likely to have more jitter due to more leisurely
edge-rates and weaker drive to fight against coupling
from other traces.
But mismatch, I doubt is important; more of a phase
adder (transforming DC offset to phase retard / advance,
across the transfer-function-slope at the input). I'd say
that a time-varying mismatch could be a jitter actor
(like floating-body SOI "history effect"). But this is not
going to come out of Monte Carlo statistics for model
params; it needs modeled in the time domain.