matchasm
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fringe capacitors what
Hi,
Does anyone have any idea how much the dielectric constant of the insulator material changes in standard CMOS processes and how much better/worse this gets with process scaling?
I guess the TC should increase as more focus is placed on low k for less parasitic capacitance?
Hi,
Does anyone have any idea how much the dielectric constant of the insulator material changes in standard CMOS processes and how much better/worse this gets with process scaling?
I guess the TC should increase as more focus is placed on low k for less parasitic capacitance?