Hi iexplorer!
I have simulated the subthreshold factor "n" and it depends on the temperature. But the variation is not so significant. Its value is nearly 1.2 [V], and varies some milivolts around it for a large temp. range (-40 to 124 ºC).
Regarding the process dependency, for sure "n" depends on it. It mainly depends on “tox” and “gamma”. But, for hand-analysis purposes, this variation is not significant as well and I would be worry about it. This is my point of view.
Regards,