Spin-on Dielectric in 180nm

[KingDarius6288]

Hello everyone,

I was wondering what is the type of material and its dielectric constant that fills the gaps around the metal 6 layer in CMOS180nm TSMC.
Thanks

 

[ThisIsNotSam]

this is not public information, it cannot be shared in a forum.

 

[dick_freebird]

Perhaps some information in this thesis (I have not waded
through it, but search terms seem valid - at least, if your
particular 180nm flow uses copper backend):

tsmc 180nm interlevel dielectric

https://www.google.com/url?sa=t&rct=j&q=&esrc=s&source=web&cd=&ved=2ahUKEwjN6f3Zwc31AhUhTDABHfZVAYcQFnoECCsQAQ&url=http%3A%2F%2Fewh.ieee.org%2Fr5%2Fdenver%2Fsscs%2FReferences%2F1999_03_Loke_PhDThesis.pdf&usg=AOvVaw1bRUNTTN_U2pRdH3v98Cm_