kawaiicat
Member level 1
mim capacitor layout
how got experience in layout smic mim capacitor?
the design rule said no other metal can under Mim, so Only Mn(M4) are for bottom plate and MIM is top plate of the cap
my question is how to connect top plate use what metal can do it, is that M5? and how about bottom plate, as if my capacitor is large, the max bottom plate (M4) only 35umX 35um, and M1,M2, M3 need away from bottom plate
if use metal 5 to connect bottom plate also, that if i got like 3x3 array capacitor, it is hard to connect them together
how got experience for that...please help
how got experience in layout smic mim capacitor?
the design rule said no other metal can under Mim, so Only Mn(M4) are for bottom plate and MIM is top plate of the cap
my question is how to connect top plate use what metal can do it, is that M5? and how about bottom plate, as if my capacitor is large, the max bottom plate (M4) only 35umX 35um, and M1,M2, M3 need away from bottom plate
if use metal 5 to connect bottom plate also, that if i got like 3x3 array capacitor, it is hard to connect them together
how got experience for that...please help