Silvaco: a-ITZO structure issue

Hello guys, I want to constructure this in silvaco but i almost got layer coating but its getting overlap in zigzag format does anyone help me with the error i will attach the png output of my coding and also coding

output :
Note the black lines are zigzag line in SiO2 and a-ITZO

coding:

go atlas
mesh space.mult=1.0
x.mesh loc=0.00 spac=0.1
x.mesh loc=10 spac=0.1
x.mesh loc=15 spac=0.1
x.mesh loc=20 spac=0.1
x.mesh loc=25 spac=0.1
y.mesh loc=0.00 spac=0.05
y.mesh loc=0.01 spac=0.05
y.mesh loc=0.05 spac=0.05
y.mesh loc=0.075 spac=0.1


region num=1 material=HfO2 x.min=0 x.max=25 y.min=0.00750 y.max=0.0750
region num=2 material=SiO2 x.min=0 x.max=25 y.min=0.0050 y.max=0.00750
region num=3 user.material=a-ITZO x.min=0 x.max=25 y.min=0 y.max=0.0050



material material = a-ITZO user.group=semiconductor user.default=SiO2 EG300=3.02
doping region=3 uniform n.type conc=5.14e15

models conmob fldmob k.p fermi incomplete consrh auger optr print

output band.temp con.band val.band band.param charge polar.charge e.mobility h.mobility u.srh u.radiative u.auger permi flowlines

method newton

solve init

save outfile=abc.str
tonyplot abc.str

I think you're seeing the thin ranks of TCAD enthusiasts...

Have you looked into Silvaco discussion forums? Don't know that there are any, but likelier to have the kinds of experienced process / device engineers you need to find.

Or, perhaps there is a need to do a deeper definition of this "oddball" unit process and it's expected outcomes. Like, maybe Silvaco knows about poly, silicon oxide & nitride, and metal dep but not tin oxide. Even if you did get what looks like a uniform film where you want it, does the tool know about electrical and optical properties and how those depend on the processing description to deliver you the sought performance result, or do you just get a picture of a black slab?

There's probably layers to this. Got to find your guru, not some guy who met one once.