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SiGe short-channel n-MOSFET atlas SLIVACO simulation

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mskh744

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Hello everyone,

I'm just having the roughest time ever trying to write an atlas code for simulating a SiGe n MOS short channel transistor. I'm really new to atlas Silvaco and I've read a couple of examples, but I don't know how to setup a short channel mesh and how to create a pesudomorphic or virtual substrate alloy of SiGe to use as substrate material.

Also, I don't know how to solve Poisson's equation using the tool and how to extrate the electrostatic potential, electric fiedl and charge across the channel of the device.


If anyone could help, I'll be forever grateful.
 

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