Interconnect scaling - the real limiter to high performance ULSI
Bohr, M.T.
Portland Technol. Development, Intel Corp., Hillsboro, OR, USA;
This paper appears in: Electron Devices Meeting, 1995., International
Publication Date: 10-13 Dec. 1995
On page(s): 241 - 244
Abstract
Reducing interconnect pitch improves layout density, but degrades interconnect RC delay. Increasing metal aspect ratio (thickness/width) improves RC delay, but maximum benefits are achieved at an aspect ratio of ~2. Adding more interconnect layers improves density and performance, but practical limits are reached in just a few generations. New conductor and dielectric materials and improved circuit design techniques will be needed to meet future ULSI interconnect requirements.