Yes, I agree with what you said, but maybe you misunderstand my averaging process, for example, if there are four dielectrical layers(die1 die2 die3 die4) between two metal layers(M2 and M1), the thickness and permitivity of each dielectrical layer are T1=1um Er1=1, T2=1um Er2=2, T3=1um Er3=3, T4=1um Er4=4 respectively. So I use one layer with thickness equal to Teq=4um(i.e. T1+T2+T3+T4) and permitivity equal to Er,eq=2.5(i.e. weighted average value:[(Er1*T1+Er2*T2+Er3*T3+Er4*T4)/(T1+T2+T3+T4)]) to substitute the four dielectrical layers between M1 and M2. With this process, the layer stack is almost not changed except the dielectrical layer types. Are you still sure this will affect the result so much?
By the way, in the substrate layer setup(i.e. the slm file), the permitivity blank can be filled with type( Re, Conductivity), I am not clear how to understand the "conductivity" of a dielectrical layer, does this mean that the dielectrical layer is conductive and can conduct current? it seems unreasonable.
another question: for there has no infinit metal layer in our inductor, then how should I to declare the ground? I tried to put ground ports on GT or AA layer where they make the PGS, but still the result can't match the s parameter results obtained from Cadence Spectre.
I really appreciate your help, thanks very much!