rph varies large than rnp

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microwaver

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Does high value poly resistor(large sheet resistor rph) process vary quite large than the small sheet poly(rnp)?I searched the PDK and did not find it,can anyone give me some explanation or reference?
 

The impurity concentration is more difficult to control at a lower level. The gate nonsilicide poly have about 50 times the doping. More stable.

Also the TC's are different. At low Rsq you have positive. RPH will have negative.
 

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