rf cmos capacitor
- Use the metal with lowest capacitance to substrate (usually top metal but not always, check design manual) for signal tracks
- Try and keep parasitic resistance to a minimum by using low sheet RHO metal and keeping tracks short. This is of course where it gets tricky as you are unlikely to want circuitry anywhere near an inductor and so will be forced to route 50um or so, and to keep sheet resistance low wide tracks are attractive, but this will increase your parasitic capacitance. Speak to your designer, ask the maximum values of parasitc R and C he can tolerate and work them out.
- Diff pairs, current mirrors etc are likely to have tight matching requirements so use dummys, cross quading etc.
- Consider having gnd shields between your RF signals and substrate, and often, between each other. Again speak to your designer, often they will not want any additional capacitance on the signal, other times they will be terrified about signals coupling into substrate and being picked up at mixer i/ps, LNA etc