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Questions about plasma in ICs

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twonsr

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About the topic of ESD, why does the plasma occur when snap-back ?

Isn't the plasma a kind of partially ionized gas ?

Why is there gas inside IC ??

TKS
 

Re: Plasma in IC

gas inside package is probably from high temperature rise from esd "spark" :)

Added after 18 seconds:

gas inside package is probably from high temperature rise made by esd "spark" :)
 

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