Problems with MEMS Module of FEMLAB

warning: inverted mesh element near coordinates

Dear Sir
Recently I have started to model the MEMS by the COMSOL MEMS MODULE. As a beginner I started by the modeling cantilever beam as described in COMSOL MEMS Module Model Library, PP.8-12. However COMSOL show me the following Error and Warnings.

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Progress - Solve Problem: Sat Jul 21 13:35:51 PDT 2007
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fem.sol=femnlin(fem, ...
'init',init, ...
'solcomp',{'lm3','u','y','x','V','lm4','v'}, ...
'outcomp',{'lm3','u','y','lm4','V','x','v'}, ...
'pname','Vin', ...
'plist',[1:6, 6.1:.1:6.3]);

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Number of degrees of freedom solved for: 13001

Parameter Vin = 1
Iter ErrEst Damping Stepsize #Res #Jac #Sol
Warning: Inverted mesh element near coordinates (0.000298653,
3.28079e-006)
1 3.2e+017 0.5000000 1.4 3 1 2
Warning: Inverted mesh element near coordinates (0.0003, 3.99772e-006)
2 9.4 0.0500000 9 4 2 4
Warning: Inverted mesh element near coordinates (0.0003, 3.99772e-006)
Warning: Inverted mesh element near coordinates (0.0003, 3.99309e-006)
Warning: Inverted mesh element near coordinates (0.0003, 3.99725e-006)
Warning: Inverted mesh element near coordinates (0.0003, 3.99762e-006)

Error:
Failed to find a solution for the initial parameter:
No convergence, even when using the minimum damping factor.
Returned solution has not converged.

What is my mistake?
What I must do?
Attachment fine the COMSOL model file. please change the file extension from .doc to .mph
Thanks in advance for your assistance