mememine
Newbie level 1
Hi all,
I need help regarding my project. my title is to design nmos with low boron activation on preamorphization silicon for ultra shallow junction formation.I am using Silvaco Athena.Can some one help on the coding to design preamorphization on nmos?the gate length is 60nm.
I need help regarding my project. my title is to design nmos with low boron activation on preamorphization silicon for ultra shallow junction formation.I am using Silvaco Athena.Can some one help on the coding to design preamorphization on nmos?the gate length is 60nm.