Port refinement error

Port refinement error (port touching internal object)

Hello,

I am trying to simulate the tapered CPW design which I imported from GDSII file. The basic Idea is to calculate the port to port impedance and calculate S params

Now the HFSS is giving this error with the waveport.

HFSSDesign2 withprobes(generic) (DrivenTerminal)
[error] Port refinement, process hf3d error: Port 2 is assigned to an internal face. Only allowed with lumped ports.. (10:55:50 Sep 24, 2013)
[error] Simulation completed with execution error on server: Local Machine. (10:55:50 Sep 24, 2013)

The only intersect I can find is between the substrate and waveport rectangle which I couldnt heal despite of trying healing options.
View attachment test.zip

I also tried it with lumped port but apparently lumped port is giving me always 50ohm impedance which cant be correct without even renormalizing the port.

Now anyone could suggest me the solution to this problem. I am uploading a file which is in HFSS 14 version,

Thanks,

Usman