ida89
Newbie level 4
hye, i'm doing a project about PIN Photodiode by using Athena. from the manual, it only show the process of silicon as the substrate. i'm using InP as the substrate
1) do i need to make an oxidation process on the InP substrate? because, if Silicon substrate, we need to oxide it by using SiO2
2) how to insert InGaAs (I+) by using athena in between InP(N+) and InP(P+)? as shown in figure below. thanks :grin:
1) do i need to make an oxidation process on the InP substrate? because, if Silicon substrate, we need to oxide it by using SiO2
2) how to insert InGaAs (I+) by using athena in between InP(N+) and InP(P+)? as shown in figure below. thanks :grin: