[SOLVED] Piezoelectric vs. MEMS accelerometers

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senmeis

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Hi,

Is it correct that piezoelectric accelerometers generally have higher resolution than MEMS ones?

Senmeis
 

Piezoelectric accelerometers is a subset of MEMS acceloremeters. Can you please provide a little more information?

An accelerometer works by measuring the displacement of a proof mass suspended on a "spring like beam" when accelerated. MEMS accelerometers means that entire arrangement is fabricated on a micro-scale. But there can be different ways to measure the displacement... You can do it by piezoelectric means, piezoresistive means or even capacitive means.
 


Sensitivity of any accelerometer can be increased by using a larger mass. MEMS accelerometers can be made employing piezoelectric sensors although it will suffer from the said issue.
Reference: "An introduction to microelectromechanical systems engineering", Nadim Maluf et al. [Chapter: MEM Structures and Systems in Industrial and Automotive Applications]
 

Please find the source of this statement in the attachment.

Senmeis
 

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  • reducingcostlydowntimeacceleroachinemaintenance1537797784355 9.pdf
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Your enclosed statement implies.. "Piezoelectric sensing is better than variable capacitance (VC) type of sensing in MEMS. "
This is completely different from your question.
 

OK, is this understanding correct: PE is better than VC but both can belong to MEMS?

Senmeis
 

Yeah. MEMS --> mechanical systems on a micro-scale. But the sensing needs to be done in someway or the other. In this case, it is either VC or piezoelectric.
 

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