Inductors simply take up too much area upto 10 GHz and below. I have seen SerDes circuits where they are now using SAW filters externally to clean up the output of a lousy onchip oscillator. Lousy oscillators take less power which is an attractive feature. If you are shooting for a high-Q system, look no further.
These SAW resonators are 20c each. They used to be $20 each in 1995; and the Q is simply not a problem anymore.
For monolithic high-Q solutions, there are Cu inductors (adds an extra step) and there are MEMs options (this increases area).
If anyone has designed and tested an inductor for a 65nm process, please share your experiences.