nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.
but now I want to have a general overview of the ayatems that implement these technologies.
or you can type keywords in the search motor engine of the web site of these labs:
IBM Zurich,
EPFL Lausanne,
LAAS France,
CEMES France
Kind regards,
Elvis
reza56 said:
nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.
but now I want to have a general overview of the ayatems that implement these technologies.