Need good study material on Process Technology

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mishrashashi

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Dear all,
I'm searching for some good study matarial for Process technology in ASIC design. Please share some links aur pdf.



Thanks in advance.


Shashi
 

You can refer to any one of these books:
1. VLSI Fabrication Principles by S.K Ghandhi
2. Microelectronic processing by Walter Scot Ruska
3. VLSI Technology by S.M. Sze

I prefer Ghandhi but for beginer Ruska is good.
 
Thanks a lot... Ineed some e book for my preparation. Plz suggest...
 

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