[moved] Silvaco TCAD FDSOI and PDSOI Device Simulation

[ram_15]

Hi

I am trying to build PDSOI MOSFET on silvaco software and i have no source to do so. Could anybody help me in doing this. I have seen an example but it is a deep sub micron SOI.

Thanks

 

[dick_freebird]

I think you might like to start from TowerJazz CA18HB
(or one of the related PDSOI flows, they have several
permutations of thin and thick SOI varying by film
thickness and # of metal layers). Silvaco PDKs exist
for a number of them (not all). I've been working in
CA18QH and CA18HB PDSOI. There are some tools which
may let you build the vertical dimension but use the X-Y
layout at least, for your meshing, and there are a lot
of examples / tutorials from Silvaco that come with the
tools install. You'd need to contact TowerJazz for the
PDK.