Metal-Insulator-Metal (MIM) capacitor is a key passive component in Radio Frequency (RF) and analog integrated circuits. MIM capacitors have attracted great attention because of their high capacitance density that supplies small area, increases circuit density, and further reduces the fabrication cost. They provide good voltage linearity properties. Developments focus on capacitance density increase through the introduction of high-k materials to replace Si3N4 (k ~ 7) and 3D high-density architectures.