mems+sugar
Hi all,
thank you very much for your answers to my previous request on MEMS. Now I am trying to simulate a shunt capacitive switch by using SUGAR2.0. This software seems very powerful and usefull for these applications. The structure under test consists of a Au bridge anchored to both sides. under the bridge there are two actuation pads in PolySi and the RF-line. I use the following functions:
anchor
beam3d
gap3de
Vsrc
eground
I have some problem using cho2cif that shuld provide an user interface to design the structure. I have already red the documentation attached to the program and present in the web site.
I would be grateful is someone has some suggestion or comment
Thank you in advance