Looking for materials about (e-beam) lithography

[z_ghadiani]

Lithography

Dear,
Can any one introduce a book, site or article that devotes to lithography methods specially e-beam lithography?
Any explanation in the topic would be appreciated?
Thanks

 

[kokabanga]

Re: Lithography

Dear,
Can any one introduce a book, site or article that devotes to lithography methods specially e-beam lithography?
Any explanation in the topic would be appreciated?
Thanks

Hi,

Did you try

hxxp://en.wikipedia.org/wiki/Electron_beam_lithography

If I have helped you please click the "helped me" button and help me.

Thank you,

All the best

 

[Aircraft Maniac]

Lithography

One good book on device fabrication is:

The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell.

A copy is floating on the net here /there.

Btw what exactly do you want to know about e-beam lithography?

 

[sreevyas]

Re: Lithography

VLSI Technology : S.M. Sze will give the lithography
Microfabrication : Madou will discuss about e-beam lithography

__Sree