lithography analysis

gon · May 18, 2013

In lithography, there is something called bossung curve. can anyone tell me how to analyse and explain in detail of it? i need to elaborate it yet i dont know how..

TADE · May 18, 2013

hi,
this may tell u some explanation about ur question,
**broken link removed**
https://www.teasystems.com/Publications/PW/BossungFocus_6152_109.pdf
https://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=900275

gon · May 18, 2013

TADE said:
hi,
this may tell u some explanation about ur question,
**broken link removed**
https://www.teasystems.com/Publications/PW/BossungFocus_6152_109.pdf
https://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=900275

thanks. i still need details on the process window drawn on the bossung curve as well as what factors that may cause them to not fits in the process window..

lithography analysis

gon

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TADE

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lithography analysis

gon

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TADE

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gon

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