INDDUMMY layer and Patterned Ground Shield

[usualsuspect]

inddummy

In order for spiral inductors to pass LVS, the INDDUMMY layer needs to be present, however, INDDUMMY layer does not allow other layers (e.g. POLY) to exist inside its boundary. So how do I make an inductor with POLY patterned ground shield pass LVS?

Thanks.

 

[nathan]

Which technology are you talking about ?

nathan

 

[flyankh]

Can you post you DRC command files for us?
Maybe I can find some useful information for you

 

[usualsuspect]

Thanks for replying. I'm using TSMC018.

DRC error: M6T.I.1: No M1 is allowed inside INDDUMM

I thought DRC doesn't allow POLY inside INDDUMM, but I guess it doesn't allow the M1-strap that ties the POLY PGS to ground.

 

[flyankh]

I think maybe some information you have ignored in DRC command file.You can search the INDDUMM in OPERATION block of it,maybe you can get idea from there)
Normally DRC report is exactly tell you what the error is,but it can not tell you which step you have done make this.So try to check the layers of devices,make sure whether all layers were here,and sometimes the layer number will cause errors too...
BTW:If you have resolve it,please tell me about it,because I am so interesting in it

 

[ilovebow]

why use poly ?