elchula
Member level 3
I have an excercise of Clean Room:
""" If we expose a 3-in wafer for 1 minutes t an air stream under a laminar flow condition at 50 ft/min, how many dust particles 0.5 um and 5 um (micron) will land on the wafer in a class 1000 clean room? """
I can't solve this excercise 'cause I don't understand some parameters to solve it.
Can you help me?
Thanks so much!
""" If we expose a 3-in wafer for 1 minutes t an air stream under a laminar flow condition at 50 ft/min, how many dust particles 0.5 um and 5 um (micron) will land on the wafer in a class 1000 clean room? """
I can't solve this excercise 'cause I don't understand some parameters to solve it.
Can you help me?
Thanks so much!