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how to simulate X-ray to silicon with Sentaurus TCAD

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I want to see the effect of the X-ray to in the Si semiconductor.

for example, i made a silicon-photo-diode, i can use “optbeam” to add a kind of visible light to simulate the photodiode. but if i want to add X-ray, what command should i use?

if anther TCAD software can offer this function, please tell me.

Thanks
 

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