If you only want to calculate the depletion width,
based on doping and bias, in a 1-D form then
there are charts and formulae that are easy to
use.
2D or 3D, you're stuck with TCAD pretty much
(maybe some formulae for curved junctions'
breakdown, etc.).
The steps are first, meshing (you have to draw
or import the physical structure and region
properties) and second, assignment of boundary
conditions. This I know from feeding layouts to
people who actually do TCAD work. This is where
to start, and a good bit of tedium.
When I was using Silvaco IC CAD tools they had
a lot of provided tutorials. It would be surprising
if the same wasn't true of the TCAD tools. Have
you exhausted that material, or even found it in
your installation documents and tutorials pile?
Gone on Silvaco's support pages?