6nH is a mighty long bond wire. You might check that for
realism. It could be reasonable with a real lousy large pkg.
You probably wouldn't lose much by shrinking the FET sizes
as long as the energy is fully transferred within the clock
phase. Call it maybe 3 tau and done, your FET Ron can be
figured for a given clock and cap value. A more leisurely
edge will tax the inductance less and make a quieter pump.
Your waveform sketch looks like some of the switch phases
are not very non-overlap. You might want to focus on the
FET terminal currents looking for any instances of cross-
conduction, make sure that your clock-field is entirely
proper.