How to load .gds layout into Optolith deckbuild to use it for litohgraphy simulation?

Status
Not open for further replies.
B

bong_za

Newbie level 4
Newbie level 4
Joined
Feb 4, 2008
Messages
5
Helped
0
Reputation
0
Reaction score
0
Trophy points
1,281
Activity points
1,307
I have a problem about lithography simulation, I had the layout from L-edit (*.gds, I can load this layout into maskview but can't write cut line.)but I don't know how to load that layout into optolith deckbuild for use to litohgraphy simulation.

Can anyone help me please?
 

Athena Optolith

Who had an example about how to use the maskview design photomask?

Sent to me please.
bong
 

Athena Optolith

Thank you for silentation.
Now I know how to use maskviews for potolith with 2D, but who are know how to plot a photoresist with 3D?

Help me please?
bong
 

Re: Athena Optolith

Hi,
I have a question ; is it possible to import layouts designed by L-edit or other tools (cadence ...) to Silvaco tools in order to simulate the lithography process ?
please explain me the possible use case of a develoment-Simulation enverinment based on Tanner - Silvaco.
 

Status
Not open for further replies.

Similar threads