How to load .gds layout into Optolith deckbuild to use it for litohgraphy simulation?

[bong_za]

I have a problem about lithography simulation, I had the layout from L-edit (*.gds, I can load this layout into maskview but can't write cut line.)but I don't know how to load that layout into optolith deckbuild for use to litohgraphy simulation.

Can anyone help me please?

 

[bong_za]

Athena Optolith

Who had an example about how to use the maskview design photomask?

Sent to me please.
bong

 

[bong_za]

Athena Optolith

Thank you for silentation.
Now I know how to use maskviews for potolith with 2D, but who are know how to plot a photoresist with 3D?

Help me please?
bong

 

[Malek Lamari]

Re: Athena Optolith

Hi,
I have a question ; is it possible to import layouts designed by L-edit or other tools (cadence ...) to Silvaco tools in order to simulate the lithography process ?
please explain me the possible use case of a develoment-Simulation enverinment based on Tanner - Silvaco.