How does a nems or a mems switch work

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There are multiple ways that these can be implemented or work. They can work based on piezoelectric properties or even capacitive properties or I am sure an array of other effects. The piezoelectric switch would have a diaphragm suspended over a canal that would be deflected when you press the button. This deflection generates a voltage which is the output of the switch (usually this is converted to a logic level but you may be able to find pure signals). The capacitive switch would have "teeth" that would be displaced when you press the button that would change the capacitance and this would also be translated into a signal (pretty much the same way accelerometers work).
 

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