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No, I disagree with both commentors earlier. Prof Kang (Dean UC Santa Curz) and Prof Rabaey (UC Berkeley) written many books on Digital IC but their books only touches surface of MOS devices and not semiconductor physics.
BTW, there is no such thing as CMOS Physics. CMOS is a technology whereby PMOS and NMOS are connected in such a way to offer zero power consumption (ideally).
I think you guys are fundamentally confused.
To be terminologically correct, either we address terms as Semiconductor Physics or Device Physics.
Added after 11 minutes:
raghav,
There are textbooks that discusses MOS scaling and related topics. Books written by Jan Rabaey, Kang, Tsividis, Michael Shur, Ureyama, Baker, Itoh, Weste, etc famous authors concentrate more on MOS scaling for Digital ICs.
If you are looking for books that touches more on MOS scaling, without much to do with IC, just on the physical aspects, then books written by SM Sze might be what you are looking for. In fact his books are more into the theoretical physics, processes and VLSI technologies, techniques, etc.
Books written by Chang (a good friend of Sze) on ULSI might also be what you are looking for.
Another person is Prof Carver Mead at Caltech who has written a few notable IEEE Journals that particularly discusses MOS scaling and VLSI.
Inventor of BSIM, Prof Hu at Berkeley, is also another person who is an expert in MOS scaling and device properties and characterisation. His papers might also be what you are looking for as well.
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