this code i tried to covert your 65nm pmos code into 65nm nmos code.Kindly check this suggest modifications in this
now the query is i want to simulate the 2 mos devices
1 in which Tio2 as dielectric instead SiO2 and
2.TiO2 as dielectric and instead poly gate i have to use metal gate
both mos devices should be of 50 nm and below
and i have to plot Id vs vgs graph of all three structures
Please suggest the modifications in the code given below
go athena
#
#To allow changing device size, set the gate length as a variable
set Lg=0.015
#
#Set up a mesh suitable for a 65nm MOSFET. The MOSFET will be symmetrical
#so just model half of the device starting mid channel at 0.0.
#Only need to model out to 0.1um so final transistor will be placed in the middle
#of a 0.2um mesh in x direction
line x loc=0 spac=0.01
line x loc=0.5*$Lg spac=0.005
line x loc=0.1 spac=0.1
#
line y loc=0.00 spac=0.005
line y loc=0.3 spac=0.015
line y loc=0.5 spac=0.02
line y loc=2 spac=1
#
# Start off by defining silicon as p type <100> with boron conc=2e15
init orientation=100 c.boron=2e15
#Deposit an oxide on the silicon surface for implanting to prevent channeling
deposit oxide thick=0.05
#nwell formation for the body of the pmos transistor. The shallowest implant
#will define the threshold voltage so vary to get desired threshold.
implant boron dose=2.6E13 energy=420 tilt=5
implant boron dose=1.0E13 energy=50 tilt=5
#Anneal the nwell and electrically activate it
diffus temp=900 time=100 weto2 hcl=3
#Remove all oxide prior to gate oxidation
etch oxide all
#Grow a thin gate oxide target 1.5nm
#Uses rapid thermal oxidation (simplified)
method fermi compress
oxide init=0.0001
diffuse temp=1000 seconds time=26 dryo2
#Display actual gate thickness acheived
extract name="Thin Gate Tox" thickness oxide mat.occno=1 x.val=0
#Deposit 200nm Gate Poly.
deposit poly thick=0.2 division=20
#Dope the poly P-Type
implant phospher dose=1.0e15 energy=15 tilt=5
#Etch the poly gate
etch poly right p1.x= 0.5*$lg
#Deposit Spacer TEOS and etch to form the oxide spacer
deposit oxide thick=0.02 division=8
etch oxide thick=0.02
struct outf=exspacer.str
#P+ Source Drain Implant (PSD). This is a very shallow implant for 65nm
#which is why we had to dope the poly earlier.
implant arsenic dose=1.0e15 energy=3 tilt=0
#Anneal PSD using spike (very fast) RTA
diffusion temp=1000 time=2 seconds f.o2=0.3 f.n2=2.7
struct outfile=expsdrta.str
#Now need to form silicide on the Source Drain and Gate regions.
#130nm and below uses sputtered Cobalt to form CoSi.
#First remove all oxide from surfaces where CoSi is to be formed.
etch oxide thick=0.014
#Sputter 40nm Cobalt
deposit cobalt thick=0.04 div=8
#Use RTA to react Cobalt with Silicon to form CoSi
diffusion temp=550 time=10 second inert
#Strip away any unreacted cobalt from non silicon surfaces
#e.g. the spacer oxide.
etch cobalt all
struct outfile=exsal.str
#mirror the structure to form the complete transistor
structure mirror left
struct outfile=final.str
#Define the electrodes
electrode name=drain x=-0.08
electrode name=source x= 0.08
electrode name=gate x= 0
electrode name=substrate backside
struct outfile=final.str
tonyplot final.str
#################################################################
go devedit
base.mesh height=1000000 width=1000000
bound.cond !apply max.slope=28 max.ratio=300 rnd.unit=0.001 line.straightening=1 align.points when=automatic
imp.refine imp="NetDoping" sensitivity=1
imp.refine min.spacing=0.01
constr.mesh max.angle=90 max.ratio=300 max.height=1 max.width=1 min.height=0.0001 min.width=0.0001
Mesh Mode=MeshBuild
refine mode=both x1=-0.5*$Lg y1=0 x2=0.5*$Lg y2=0.2
######################################
go atlas
# set material models
models cvt srh print
contact name=gate.poly
interface qf=3e10
# get initial solution
solve init
method newton trap
solve prev
# Bias the drain a bit...
solve vdrain=0.05 vstep=0.025 vfinal=0.1 name=drain
log outf=final.log
solve name=gate vgate=0 vfinal=1.0 vstep=0.1
extract name="vt" (xintercept(maxslope(curve(abs(v."gate"),abs(i."drain")))) \
- abs(ave(v."drain"))/2.0)
extract name="beta" slope(maxslope(curve(abs(v."gate"),abs(i."drain")))) * \
(1.0/abs(ave(v."drain")))
extract name="theta" ((max(abs(v."drain")) * $"beta")/max(abs(i."drain"))) - \
(1.0 / (max(abs(v."gate")) - ($"vt")))
tonyplot final.log
please help me to do this